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The Intellium™ H2000 Simultaneous Phase- Shifting Fizeau Interferometer is vibration-insensitive which captures events as fast as 10 microseconds. Ideally suited for production and other vibration-prone environments, the H2000 offers excellent measurement versatility for testing large optics, machined parts and semiconductor wafers. A variety of different wavelengths are available.
The H2000 uses industry standard 100mm reference optics. Additionally ESDI offers a range of accessories, including 150mm (6"), 200mm (8") and 300mm (12") Beam Expanders and other large aperture system and optical components.

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How it Works
Reference and test beams travel the common path through the optical system of the interferometer. Our
simultaneous
phase-shifting common-path Fizeau interferometer is accomplished using ESDI’s revolutionary HyperPhase™ Module (patents pending). The module uses three sub-pixel aligned cameras, which are monolithically bonded together with the beam splitting and polarization optics into a rugged package smaller than two stacked deck of cards. The result is a rigid camera system similar to high-end 3-Chip color cameras with lifetime alignment. The advantage of using three cameras is that each of the interferograms retains the true resolution of the camera.

Applications
- Measuring high speed events such as fluid flow and thermodynamics
- High accuracy measurements using large beam expanders
- In-situ measurements of machined parts, disks, semiconductor wafers
- Measurements on production floors in vibration-prone environments
- Long path measurements across multiple optical elements
Main Features & Benefits
- Vibration Insensitive
- Capture events down to 10μs
- 1024x768 true resolution
- Compact 190mm (7.5”) x 370mm (14.6”) footprint
- Standard 100mm (4”) reference optics
- Lifetime module alignment guarantee
Intellium™ H2000 Fizeau Interferometer Specifications
Technology |
Patent Pending Simultaneous Phase-shifting |
System |
Test Beam |
102mm (4.0”) |
Zoom |
6X continuous optical , 8x digital |
Focus |
+/- 4.0m |
Intensity |
Rotary dial |
Alignment |
Simple two spot alignment |
Alignment View |
± 1.8 degrees |
Part Viewing |
Live video on computer screen |
Performance |
Repeatability 3-flat 1 |
λ/300 PV |
RMS Repeatability 2 |
λ/3000 |
Calibrated Accuracy |
<λ/100 |
Uncalibrated Accuracy |
λ/20 |
Height Resolution |
λ/8000 |
Spatial Resolution |
1024 x 768 (True Resolution) |
Fringe Resolution |
220 fringes |
Digitization |
8 bits |
Acquisition Time |
30 ms |
Exposure Time |
Minimum 10 μs |
Averaging Modes |
Intensity and Phase |
Sample Reflectivity |
0.1 to 100% |
Laser Beam |
Source |
He-Ne |
Laser Diode |
Laser Diode |
632.8nm, 2mW |
642nm, 25 W |
1064nm, 100-500mW |
Polarization |
Circular |
Linear (circular optional) |
Coherence |
>100 m |
50-70m |
300m |
Electrical |
Power |
110/240 Volts, 50/60 Hz, 50 Watts |
Mechanical |
Dimensions |
(337mm x 190mm x 254mm), 13.3” x 7.5” x 10” |
Weight |
14 kg (31 lb) |
Environmental Req. |
Temperature |
15 to 30 °C (59 to 86°F) |
Rate of temp. change |
< 1.0°C per 15 min |
Humidity |
Relative 5% to 95%, no condensing |
Vibration |
Virtually vibration insensitive |
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Computer |
(included) |
Assuming reasonable vibration suppression (isolation table, minimal thermals, etc.)
- 1 sigma repeatability of 3-Flat Test with 16 averages per set.
- 1 sigma of the rms for 10 data sets, each an average of 16 measurements.
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