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Intellium™ H2000 Fizeau Interferometer

Simultaneous Phase-Shifting for Vibration-Prone Environments

 
 

Intellium™ H2000 Simultaneous Phase- Shifting Fizeau InterferometerThe Intellium™ H2000 Simultaneous Phase- Shifting Fizeau Interferometer is vibration-insensitive which captures events as fast as 10 microseconds. Ideally suited for production and other vibration-prone environments, the H2000 offers excellent measurement versatility for testing large optics, machined parts and semiconductor wafers. A variety of different wavelengths are available. The H2000 uses industry standard 100mm reference optics. Additionally ESDI offers a range of accessories, including 150mm (6"), 200mm (8") and 300mm (12") Beam Expanders and other large aperture system and optical components.

 


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How it Works

Reference and test beams travel the common path through the optical system of the interferometer. Our simultaneous phase-shifting common-path Fizeau interferometer is accomplished using ESDI’s revolutionary HyperPhase™ Module (patents pending). The module uses three sub-pixel aligned cameras, which are monolithically bonded together with the beam splitting and polarization optics into a rugged package smaller than two stacked deck of cards. The result is a rigid camera system similar to high-end 3-Chip color cameras with lifetime alignment. The advantage of using three cameras is that each of the interferograms retains the true resolution of the camera.

 

Applications

  • Measuring high speed events such as fluid flow and thermodynamics
  • High accuracy measurements using large beam expanders
  • In-situ measurements of machined parts, disks, semiconductor wafers
  • Measurements on production floors in vibration-prone environments
  • Long path measurements across multiple optical elements

Main Features & Benefits

  • Vibration Insensitive
  • Capture events down to 10μs
  • 1024x768 true resolution
  • Compact 190mm (7.5”) x 370mm (14.6”) footprint
  • Standard 100mm (4”) reference optics
  • Lifetime module alignment guarantee

 

Intellium™ H2000 Fizeau Interferometer Specifications

Technology

Patent Pending Simultaneous Phase-shifting

System

Test Beam

102mm (4.0”)

Zoom

6X continuous optical , 8x digital

Focus

+/- 4.0m

Intensity

Rotary dial

Alignment

Simple two spot alignment

Alignment View

± 1.8 degrees

Part Viewing

Live video on computer screen

Performance

Repeatability 3-flat 1

λ/300 PV

RMS Repeatability 2

λ/3000

Calibrated Accuracy

<λ/100

Uncalibrated Accuracy

λ/20

Height Resolution

λ/8000

Spatial Resolution

1024 x 768 (True Resolution)

Fringe Resolution

220 fringes

Digitization

8 bits

Acquisition Time

30 ms

Exposure Time

Minimum 10 μs

Averaging Modes

Intensity and Phase

Sample Reflectivity

0.1 to 100%

Laser Beam

Source

He-Ne

Laser Diode

Laser Diode

632.8nm, 2mW

642nm, 25 W

1064nm, 100-500mW

Polarization

Circular

Linear (circular optional)

Coherence

>100 m

50-70m

300m

Electrical

Power

110/240 Volts, 50/60 Hz, 50 Watts

Mechanical

Dimensions

(337mm x 190mm x 254mm), 13.3” x 7.5” x 10”

Weight

14 kg (31 lb)

Environmental Req.

Temperature

15 to 30 °C (59 to 86°F)

Rate of temp. change

< 1.0°C per 15 min

Humidity

Relative 5% to 95%, no condensing

Vibration

Virtually vibration insensitive

 

Computer

(included)


Assuming reasonable vibration suppression (isolation table, minimal thermals, etc.)

  1. 1 sigma repeatability of 3-Flat Test with 16 averages per set.
  2. 1 sigma of the rms for 10 data sets, each an average of 16 measurements.

 

 
   
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