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Compare All Intellium™ Interferometers
 
 

 Specification
Field of View
30mm (dia)
38mm (dia)
102mm (dia)
  expandable
 102mm (dia)
100mm (dia)
  expandable
Wavelength (nm)
635
632.8

632.8 - Std&HR
 1053 - NIR
 1064 - NIR
 1300 - NIR

632.8
  642
632.8
  642
  1064
Polarization
Circular
Circular
Circular
  (Linear optional)
Circular
Linear
 Circular optional)
Coherence (m)
<100m
>100m
>100m
>100m
>100m
Zoom
N/A
6:1
6:1
6:1
6:1
Focus Control
Yes
Yes
Yes
Yes
Yes
Intensity Control
Yes
Yes
Yes
Yes
Yes
Contrast Control
No
No
No
No
Yes
Alignment View
tbd
+/- 1.8 deg
+/- 1.8 deg
+/- 1.8 deg
+/- 1.8 deg
Camera Resolution
640 x 480
640 x 480
640 x 480-Std&NIR
 1280 x 1024-NIR
 2048 x 1536-HR
512 x 512
 (4 fringes/ pixel)
1024 x 768
Digitization
8 bits
8 bits
 8 bits - Std&NIR
 10 bits - HR&NIR
8 bits
8 bits
Acquisition Time (ms)
33ms
300ms
300ms - Std&NIR
  600ms - HR
300ms
as low as 10us
Averaging Modes
Intensity
 & Phase
Intensity
 & Phase
Intensity
 & Phase
Intensity
 & Phase
Intensity
 & Phase
Phase Shifter Option
No
Yes
Yes
Included
Simultaneous
PV Calibrated
  Accuracy (1)
λ/20
λ/100
λ/100
TBD
<λ/100
PV Repeatability of 3
  Flat Test (2)
tbd
λ/300
λ/300
λ/300
λ/300
RMS Repeatability (3)
tbd
λ/2,000
λ/2,000
λ/2,000
λ/3,000
Fringe Resolution
 (fringes)
180
180
180 - Std&NIR
  560 - HR
  300 - NIR
2,000
220
Height Resolution
 λ/20
 λ/8000
 λ/8000
 λ/8000
 λ/8000
Power Requirements
110/240V,
 50/60Hz, 20w
110/240V,
 50/60Hz, 50w
110/240V,
 50/60Hz, 50w
110/240V,
 50/60Hz, 50w
110/240V,
 50/60Hz, 50w
Dimensions
  L x W x H (mm)
80x180x215
254x165x140
338x190x254
338x190x254
337x190x254
 Weight (Kg)
 2
 7.25
 14
 14
 14
  1. Calibrated Average P-V value of 20 repeated measurements of a high-quality flat with surface error.

  2. Repeatability of a three-flat test. Flat ‘A’ is tested six times using a three-flat test, using six pairs of flats B, C, D, and E to complete six three-flat combinations using 16 phase averages per data per set. This represents the 2σ value from the six three-flat tests. Relative system accuracy for testing is dependent on the quality of the reference optic.

  3. 1σ of RMS for 10 data sets, each an average of 10 data sets where each data set is a pixel-by-pixel average of 16 individual measurements on an optical flat.

 

 
   
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