The Intellium™ H2000 Simultaneous Phase-Shifting Fizeau Interferometer is a real-time, high-speed, truly vibration-insensitive metrology instrument with shutter speeds as fast as 10µs. Ideally suited for shop/production floors and other vibration or turbulent environments, the Intellium™ H2000 offers unsurpassed measurement versatility, stability and repeatability for measuring and analyzing optical, machined and semiconductor wafer surfaces. The H2000 uses industry standard 100mm reference optics. Additionally ESDI offers a range of accessories, including 150mm (6"), 200mm (8") and 300mm (12") Beam Expanders and other large aperture system and optical components.

How it Works

Reference and test beams travel the common path through the optical system of the interferometer. Our simultaneous phase-shifting common-path Fizeau interferometer is accomplished by replacing the standard camera with ESDI’s patented HyperPhase™ Module. The module uses three sub-pixel aligned cameras, which are monolithically bonded together with the beam splitting and polarization optics into a rugged package smaller than two stacked deck of cards. The result is a rigid camera system similar to high-end 3-Chip color cameras with lifetime alignment. The advantage of using three cameras is that each of the interferograms retains the true resolution of the camera. The HyperPhase™ module is so robust it is backed by a lifetime alignment and phase-shift warranty.

Intellium™ H2000 with SPARC^®

All polarization based, vibration insensitive interferometers are in essence, dual beam interferometers. This is so because they use orthogonally polarized test and reference beams to achieve simultaneous phase-shifting. Therefore, birefringence (natural or stress induced) in the optical system of the interferometer, or transmission optic, will introduce changes in phase between the P- and S-polarized beams which will result in measurement errors. However, the unique design of the H2000, coupled with SPARC^®, allows ESDI to overcome and eliminate these errors. With SPARC^®, the H2000 has been demonstrated to make measurements exceeding λ/100. The H2000 is dual beam, like all other polarization based interferometers, but no other has the capability to achieve this performance level.

Applications

• Measure flat, concave and convex surfaces, small to astronomical
• Long optical path length and remote Fizeau cavity measurements
• Vacuum/cryogenic chamber measurements
• In-situ measurements of optical, machined & wafer surfaces
• High speed measurements for fluid flow and thermodynamic events
• Characterization of birefringence
  

Main Features & Benefits

• Vibration insensitive
• True common path Fizeau interferometer
• Can characterize surfaces with 0.1% to 100% reflectivities
• 10μs exposure times
• True 1k x 1k resolution, 325 fringes of tilt
• Uses Industry Standard 102 mm (4”) reference optics
• Lifetime HyperPhase™ module alignment guarantee